Description

Switches based on phase change materials (PCM) demonstrate excellent RF performance (FOM <10fs) and can be co-integrated into the BEOL of CMOS processes. However, their reliability is still very little studied today. Failure modes such as heater breakage, segregation, or the appearance of cavities in the material are shown during endurance tests, but the mechanisms of these failures are not discussed. The objective of this thesis will therefore be to study the failure modes and mechanisms for different operating conditions (endurance, hold, power). The analysis will be carried out through electrical and physical characterizations and accelerated aging methods will be implemented.